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4-axis stage Product List

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Gantry-type 4-axis stage

Gantry-type 4-axis stage

XY-axis stage driven by a linear motor on a stone base plate, equipped with a Z-axis unit driven by a ball screw on a gantry frame, forming a compact XYZ stage. 【Features】 ○ The Z-axis can accommodate imaging equipment such as microscopes, making it ideal for inspection processes up to 300mm in size. ○ Compared to a standard 4-axis unit, the height of the high-precision X-Y-θ axes can be kept low through linear drive, resulting in no table shake and excellent uniformity even during high-speed movement. ● For other functions and details, please download the catalog.

  • Other semiconductor manufacturing equipment

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